1x Multi-Transmission Test Masks
Setting up your new lithography process or trouble-shooting/optimizing existing processes is time consuming and expensive, especially when using 1x exposure systems. Eliminate frustration, save time, and reduce costs with these handy multi-transmission test reticles designed to allow for quick determination of optimum exposure dose using a single wafer or substrate.
Typical Applications
- Find optimum dose and exposure latitude with a single 1x exposure
- Standard design may be customized
- 5" and 7" glass are standard; other sizes available via custom order
- Saves hours of set up time and spend on materials
Design Features
- Typical transmission values from 30 to 70% plus 100%
- Actual spectrophotometer transmission measurements provided with each reticle.
- Transmission film is resistant to typical solvent cleans
- Open windows provided for each transmission region allow for ellipsometer use
- Standard resolution patterns included
- Production proven in over 200 fabs
Contact your Integrated Micro Materials representative for more information or a quotation for 1x test reticles.
I would like more information or a quotation for Integrated Micro Materials' test masks.